Production method of stacked piezoelectric element

Metal working – Piezoelectric device making

Reexamination Certificate

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C029S025420, C310S328000

Reexamination Certificate

active

10858473

ABSTRACT:
A stacked piezoelectric element is produced by alternately stacking a piezoelectric layer and an inner electrode layer. The method includes producing a green sheet110for a base, forming a unit body3having a narrow stacked part30where a narrow piezoelectric material layer115having an area smaller than the green sheet110for base and an electrode material layer20having an area smaller than the green sheet110for base are stacked, the unit body being formed by disposing the narrow stacked part30on the green sheet110for base; forming a stacked body having groove parts by stacking a plurality of the unit bodies3, the groove part having the bottom being defined by the side face of the narrow stacked part30; and firing the stacked body.

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