Production method of oxide superconductive film

Details Production method of oxide superconductive film Production method of oxide superconductive film

1998-03-31

1999-12-28

King, Roy V.

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

With melting

505451, 505450, 505733, 505729, C30B 1900, H01L 3924

Patent

active

060081627

ABSTRACT:
The present invention can provide an oxide superconductive film with a smooth surface and at homogeneous thickness on a simple substrate structure at a high film formation rate. In a liquid phase epitaxial growth method for producing an ReBa.sub.2 Cu.sub.3 Ox film (3) (Rerepresents one selected from lanthanoids such as Y and Nd, and X represents the oxygen amount) having a 123 type crystal structure from a molten liquid (1), a substrate (2) surface is inclined by 1 degree to 44 degrees with respect to the molten liquid surface at the time of separating the film from the molten liquid after film formation. After separating the film from the molten liquid, the substrate is rotated at 300 rpm to 3000 rpm for 5 seconds to 5 minutes. The film formation atmosphere contains 2 at. % of oxygen and 98 at. % of nitrogen, and the film formation temperature is 900 to 970.degree. C.

REFERENCES:
patent: 5055445 (1991-10-01), Belt et al.
patent: 5077271 (1991-12-01), Hiskes et al.
patent: 5162297 (1992-11-01), Terashima et al.
S.R. Foltyn et al., "Pulsed Lawser Deposition of Thick YBa Cu O .sub.- .delta. Films with J 1 MA/cm", Applied Physics Letters vol. 63, No. 13, Sep. 27, 1993, pp. 1848-1850.
T. Kitamura et al., "Field-Induced Pinning Center YBA Cu O .sup.- Superconducting Thick Film Prepared by Liquid Phase Epitaxy", Physica C vol. 256, (1996), pp. 64-72.
N. Newman et al., "High Temperature Superconducting Microwave Devices: Fundamental Issues in Material, Physics, and Engineering", Journal of Superconductivity vol. 6, No. 3, (1993), pp. 119-160.
Z. Ma et al., "RF Power Dependence Study of Large Area YBCO Thin Films", IEEE Transactions on Applied Superconductivity vol. 7, No. 2, Jun. 1997, pp. 1911-1916.
T. Kimura et al., "Growth Mechanism of Thick c-axis Oriented YBa C O .sub.- Films Prepared by Liquid Phase Epitaxy", Journal of Crystal Growth vol. 158, (1996), pp. 61-670 No Month Data!.
S. Miura et al., "Electrical Properties of YBaCuOx Films Grown by Liquid Phase Epitaxy", 6th International Superconductive Conference No. 2, J16, pp. 22-24 No Year and Month Data!.

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