Production method of a high magnetic permeability film

Details Production method of a high magnetic permeability film Production method of a high magnetic permeability film

1984-10-24

1986-06-03

Pianalto, Bernard D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427130, 427131, 427132, 427250, 4272552, B05D 306

Patent

active

045929238

ABSTRACT:
A method for producing a high magnetic permeability alloy film, wherein an alloy material composed of 1-6 wt % Al, 20-35 wt % Si and the remainder of iron is irradiated with an electron beam in a vacuum deposition apparatus equipped with an electron gun, and the vapor of the alloy material is deposited on a substrate for a predetermined time to form a high magnetic permeability alloy film, comprising further a step of preventing the irregular deposition caused if the concentration of aluminum in the vapor to be deposited increases.

REFERENCES:
patent: 4168187 (1979-09-01), Takayanagi et al.
patent: 4450186 (1984-05-01), Shinohara

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