Production method of a high magnetic permeability alloy film

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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Details

427129, 427132, 427250, 427255, 427314, 427319, B05D 306, C23C 1606

Patent

active

047029358

ABSTRACT:
A production method for producing a high permeability alloy film which includes evaporating an alloy material composed of 1-6 wt % Al, 20-35 wt % Si, and the remainder of iron by irradiating the alloy with an electron beam, and then depositing the vapor from the alloy material onto a substrate for a predetermined time to produce an alloy film composition having a high permeability. The vapor deposition onto the substrate is preferably intercepted with the shutter until the concentration of aluminum of the vapor to be deposited has been decreased to a value between 20 and about 4 wt %.

REFERENCES:
patent: 4354908 (1982-10-01), Shirahata et al.
patent: 4390601 (1983-06-01), Ono et al.

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