Plastic and nonmetallic article shaping or treating: processes – Optical article shaping or treating – Light polarizing article or holographic article
Reexamination Certificate
2001-05-14
2004-02-24
Vargot, Mathieu D. (Department: 1732)
Plastic and nonmetallic article shaping or treating: processes
Optical article shaping or treating
Light polarizing article or holographic article
C205S068000, C205S070000, C264S001360, C264S002500, C425S810000
Reexamination Certificate
active
06695987
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a thin film for stamper formation, formed on the surface of a patterned resist material, to be used as an electrode for electrocasting of a stamper material, and an electrode material for stamper formation to be used as the material for such an electrode.
2. Description of the Related Art
Optical discs such as a CD and a DVD are mass-produced, using an optical disc original disc called a stamper.
FIGS. 8A
to
8
F show a conventional stamper production method. First, as shown in
FIG. 8A
, a photoresist film
102
is formed on a glass substrate
101
by spin coating, or the like. Then, as shown in
FIG. 8B
, the photo resist film
102
is exposed by a laser beam so as to form a latent image
102
a
. Next, by developing the photo resist film
102
, a pattern having a groove part
102
b
as shown in
FIG. 8C
is formed. Then, as shown in
FIG. 8D
, a nickel thin film
103
is formed on the surface of the photo resist film
102
and the glass substrate
101
by a sputtering method, a vapor deposition method, or the like. Thereafter, as shown in
FIG. 8E
, by applying a nickel electrocasting on the nickel thin film
103
surface, using the nickel thin film
103
as an electrode, a nickel layer
104
is formed. As shown in
FIG. 8F
, after peeling off the nickel layer
104
from the glass substrate
101
, by polishing the upper surface of the nickel layer
104
, or the like in
FIG. 8F
, a stamper
104
A can be obtained.
A higher recording density is further required to the optical discs. The expected demand of a high recording density for ensuring a recording capacity of as much as a several tens of GB or more in a 12 cm diameter disc cannot be dealt with by the above-mentioned laser cutting using a laser beam, and thus an electron beam cutting using an electron beam attracts the attention as a method instead of the laser beam cutting. According to the electron beam cutting, a highly fine pattern can be formed compared with the conventional laser beam cutting.
However, in order to execute the electron beam cutting, the electron absorption sensitivity of the resist material should be improved, and thus an electron attractive group such as a chlorine, a sulfur, and a fluorine, or the like is introduced into the resist material. However, it was revealed that a problem of the stamper quality deterioration arises by the damage of the nickel thin film due to reaction of the electron attractive group in the resist material and the nickel thin film at the time of applying the nickel electrocasting.
SUMMARY OF THE INVENTION
Accordingly, an object of the present invention is to provide a production method for an optical disc, capable of obtaining a good S/N ratio without deterioration of the stamper quality due to reaction with an electron attractive group contained in a resist material.
A production method for an optical disc according to the present invention comprises the processes of forming a resist film on a substrate, patterning the resist film on the substrate by an electron beam cutting, forming an electrode on the patterned resist film, forming a metal layer on the electrode by the electrocasting, and injection molding of a resin, using the metal layer peeled off from the electrode as a stamper, wherein the electrode contains Ni element as the main component as well as Ru element by less than 25% by weight.
According to the production method for an optical disc, since reaction of Ni in the electrode material and an electron attractive group contained in the resist material can be restrained, the stamper quality deterioration can be prevented. Moreover, since the electrode can be formed with the excellent flatness, the S/N ratio of the optical disc can be improved.
A production method for an optical disc according to the present invention comprises the processes of forming a resist film on a substrate, patterning the resist film on the substrate by an electron beam cutting, forming an electrode on the patterned resist film, forming a metal layer on the electrode by the electrocasting, and injection molding of a resin, using the metal layer peeled off from the electrode as a stamper, wherein the electrode contains Ni element as the main component as well as Cu element by less than 25% by weight.
According to the production method for an optical disc, since reaction of Ni in the electrode material and an electron attractive group contained in the resist material can be restrained, the stamper quality deterioration can be prevented.
A production method for an optical disc according to the present invention comprises the processes of forming a resist film on a substrate, patterning the resist film on the substrate by an electron beam cutting, forming an electrode on the patterned resist film, forming a metal layer on the electrode by the electrocasting, and injection molding of a resin, using the metal layer peeled off from the electrode as a stamper, wherein the electrode contains Ni element as the main component as well as P element by less than 25% by weight.
According to the production method for an optical disc, since reaction of Ni in the electrode material and an electron attractive group contained in the resist material can be restrained, the stamper quality deterioration can be prevented.
A production method for an optical disc according to the present invention comprises the processes of forming a resist film on a substrate, patterning the resist film on the substrate by an electron beam cutting, forming an electrode on the patterned resist film, forming a metal layer on the electrode by the electrocasting, and injection molding of a resin, using the metal layer peeled off from the electrode as a stamper, wherein the electrode contains Ni element as the main component as well as Mg element by less than 25% by weight.
According to the production method for an optical disc, since reaction of Ni in the electrode material and an electron attractive group contained in the resist material can be restrained, the stamper quality deterioration can be prevented.
A production method for an optical disc according to the present invention comprises the processes of forming a resist film on a substrate, patterning the resist film on the substrate by an electron beam cutting, forming an electrode on the patterned resist film, forming a metal layer on the electrode by the electrocasting, and injection molding of a resin, using the metal layer peeled off from the electrode as a stamper, wherein the electrode contains Ni element as the main component as well as Cr element by less than 25% by weight.
According to the production method for an optical disc, since reaction of Ni in the electrode material and an electron attractive group contained in the resist material can be restrained, the stamper quality deterioration can be prevented. Moreover, since the electrode can be formed with the excellent flatness, the S/N ratio of the optical disc can be improved.
A production method for an optical disc according to the present invention comprises the processes of forming a resist film on a substrate, patterning the resist film on the substrate by an electron beam cutting, forming an electrode on the patterned resist film, forming a metal layer on the electrode by the electrocasting, and injection molding of a resin, using the metal layer peeled off from the electrode as a stamper, wherein the electrode contains Ni element as the main component as well as Au element by less than 25% by weight.
According to the production method for an optical disc, since reaction of Ni in the electrode material and an electron attractive group contained in the resist material can be restrained, the stamper quality deterioration can be prevented.
A production method for an optical disc according to the present invention comprises the processes of forming a resist film on a substrate, patterning the resist film on the substrate by an electron beam cutting, forming an electrode on the patterned resist film, forming a metal layer on t
Iida Tetsuya
Katsumura Masahiro
Ueno Takashi
Pioneer Corporation
Vargot Mathieu D.
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