Production apparatus for producing a crystal

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus

Reexamination Certificate

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C117S204000, C117S223000, C117S940000

Reexamination Certificate

active

06875275

ABSTRACT:
A production apparatus for producing a crystal includes a crucible divided into a plurality of stages, each stage containing a crystal precursor material, and a heater arranged to heat the crucible. The crucible has formed therein a degassing hole in a side wall portion thereof for discharging an impurity gas produced when refining the crystal precursor material by adding a scavenger thereto, and a lower portion of a first stage of the plurality of stages is positioned to cover an upper edge of a wall portion of a second stage of the plurality of stages. The overall height of the plurality of stages is 10 mm to 50 mm, the degassing hole has a diameter of 1 mm to 5 mm, and a fluoride crystal is formed from the crystal precursor material.

REFERENCES:
patent: 2214976 (1940-09-01), Stockbarger
patent: 4030965 (1977-06-01), Hammond et al.
patent: 4032313 (1977-06-01), Tokuhara
patent: 4076574 (1978-02-01), Pastor et al.
patent: 4379733 (1983-04-01), Pastor et al.
patent: 4649002 (1987-03-01), Kim et al.
patent: 4818282 (1989-04-01), Wanetzky et al.
patent: 61-44792 (1986-03-01), None
patent: 4349198 (1992-12-01), None
patent: 4-349198 (1992-12-01), None
patent: 4349199 (1992-12-01), None
patent: 4-349199 (1992-12-01), None
V.N. Cheredov, “Contaminant Color Centers in Synthetic Crystals of Calcium Fluoride”, Inorganic Material, vol. 28, No. 3. 1992 (Russian Pulication).*
V.N. Cheredov, “Contaminant Color Centers In Synthetic Crystals of Calcium Fluoride”, Inorganic Material, vol. 28, No. 3, 1992 (Russian/Publications); no English translation available.

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