Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2004-07-14
2011-10-25
Lee, John (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C029S833000, C348S126000, C382S149000, C382S151000, C382S152000, C438S016000
Reexamination Certificate
active
08045788
ABSTRACT:
An inspection tool includes a camera for obtaining images of a wafer and a controller configured for performing light source flat field correction, optical image warping correction, and optical image scale correction of the images. In operation, separate inspection tools are calibrated separately to obtain a characteristic response with respect to imaging and/or illumination for each such inspection tool. A standard target is then imaged by each inspection tool and the response of each of the inspection tools is normalized to ensure uniformity of the output of each inspection tool with respect to the other inspection tools.
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Simpkins Patrick
Watkins Cory
August Technology Corp.
Dicke Billig & Czaja, PLLC
Lee John
LandOfFree
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