Product-related feedback for process control

Details Product-related feedback for process control Product-related feedback for process control

2005-10-14

2010-02-02

Jarrett, Ryan A (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S108000

Reexamination Certificate

active

07657339

ABSTRACT:
A method, apparatus, and a system for performing a product feedback for process control are provided. Metrology data relating to a first workpiece is received. An end of line parameter relating to the first workpiece is received. The end of line parameter is correlated with the metrology data. A process control associated with a plurality of processes to be performed on a second workpiece is adjusted based upon the correlating.

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patent: 02/47150 (2002-06-01), None
PCT International Search Report, Apr. 13, 2007.
Official Communication issued May 18, 2009 (Translation); 5 pages.

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