Product defect detection using thermal ratio analysis

Radiant energy – Infrared-to-visible imaging

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250332, 358106, 374 4, 374 5, 382 1, 382 43, H01L 3100

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active

050327275

ABSTRACT:
A method and apparatus for indicating defects in manufactured products employs, instead of the conventional thermal image subtraction, "thermal ratio analysis", which involves ratios of thermal data and their analysis including statistical analysis. Various techniques for "image" enhancement and for suppression of known artifacts are employed to facilitate the decision as to when a defect is detected. The thermal ratio analysis technique is particularly useful for detecting hidden defects in electronic circuitry, such as integrated circuits.

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Hugh Danaher, "Thermography-Understanding the Expanded Role of Thermal Imagers in Production Testing", Evaluation Engineering, Dec., 1988, pp. 74, 75, 77-79.

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