Radiant energy – Infrared-to-visible imaging
Patent
1990-09-14
1991-07-16
Cuchlinski, Jr., William A.
Radiant energy
Infrared-to-visible imaging
250332, 358106, 374 4, 374 5, 382 1, 382 43, H01L 3100
Patent
active
050327275
ABSTRACT:
A method and apparatus for indicating defects in manufactured products employs, instead of the conventional thermal image subtraction, "thermal ratio analysis", which involves ratios of thermal data and their analysis including statistical analysis. Various techniques for "image" enhancement and for suppression of known artifacts are employed to facilitate the decision as to when a defect is detected. The thermal ratio analysis technique is particularly useful for detecting hidden defects in electronic circuitry, such as integrated circuits.
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Cox, Jr. Eldon E.
Rolla Michael P.
Bennett G. Bradley
Cuchlinski Jr. William A.
Digital Equipment Corporation
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