Fishing – trapping – and vermin destroying
Patent
1991-03-04
1991-12-17
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437 20, 437 21, 437 23, 437 27, 148DIG83, 148DIG84, 2504931, H01L 2100, H01L 2102, H01L 21306
Patent
active
050735071
ABSTRACT:
A plasma containing both beryllium ions and beryllium fluoride ions is achieved. Beryllium crystals are used as a cathode in an ionization chamber containing boron trifluoride gas. The boron trifluoride gas and the beryllium are ionized to produce both beryllium fluoride ions (BeF.sup.+) and beryllium ions (Be.sup.+). Beryllium fluoride ions are emitted to impact a semiconductor target and where they divide thereby implanting beryllium and fluorine.
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Keller Charles T.
Wu Schyi-Yi
Barbee Joe E.
Chaudhuri Olik
Everhart B.
Handy Robert M.
Motorola Inc.
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