Producing a plasma containing beryllium and beryllium fluoride

Fishing – trapping – and vermin destroying

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437 20, 437 21, 437 23, 437 27, 148DIG83, 148DIG84, 2504931, H01L 2100, H01L 2102, H01L 21306

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050735071

ABSTRACT:
A plasma containing both beryllium ions and beryllium fluoride ions is achieved. Beryllium crystals are used as a cathode in an ionization chamber containing boron trifluoride gas. The boron trifluoride gas and the beryllium are ionized to produce both beryllium fluoride ions (BeF.sup.+) and beryllium ions (Be.sup.+). Beryllium fluoride ions are emitted to impact a semiconductor target and where they divide thereby implanting beryllium and fluorine.

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Hallali, P., Effect of F Co-Implant During Annealing of Be-Implanted GaAs, Appl. Phys. Lett. (U.S.A.), vol. 57, No. 6, Aug. 6, 1990, pp. 569-571.

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