Processing tube for use in a semiconductor wafer heat processing

Details Processing tube for use in a semiconductor wafer heat processing Processing tube for use in a semiconductor wafer heat processing

1997-07-24

1999-02-09

Vinson, Brian N.

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

1303

Patent

active

D04054296

REFERENCES:
patent: 4587689 (1986-05-01), Lee
patent: 5046909 (1991-09-01), Murdoch
patent: 5314574 (1994-05-01), Takahashi
patent: 5320218 (1994-06-01), Yamashita et al.
patent: 5407449 (1995-04-01), Zinger
patent: 5516732 (1996-05-01), Flegal
patent: 5518360 (1996-05-01), Toda et al.
patent: 5536128 (1996-07-01), Shimoyashiro et al.
patent: 5658115 (1997-08-01), Yamazaki et al.
patent: 5752796 (1998-05-01), Muka

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