Processing systems and methods for semiconductor devices

Details Processing systems and methods for semiconductor devices Processing systems and methods for semiconductor devices

2006-11-09

2010-12-14

Hendricks, Keith D (Department: 1781)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C134S002000, C134S003000

Reexamination Certificate

active

07851373

ABSTRACT:
Systems and methods for processing semiconductor devices are disclosed. A preferred embodiment comprises a processing method that includes providing a processing system including a first container and a second container fluidly coupled to the first container, the second container being adapted to receive and retain an overflow amount of a fluid from the first container, and disposing the fluid in the first container and a portion of the second container. The method includes providing at least one semiconductor device, disposing the at least one semiconductor device in the first container, and maintaining the fluid in the second container substantially to a first level while processing the at least one semiconductor device with the fluid.

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