Processing system having vacuum manifold isolation

Details Processing system having vacuum manifold isolation Processing system having vacuum manifold isolation

1998-08-21

2000-03-28

Michalsky, Gerald A.

Fluid handling

Systems

With pump

137614, G05D 1600

Patent

active

060418176

ABSTRACT:
An additional isolation valve is incorporated into a vacuum processing system to increase the life of the system's mechanical pump, reduce maintenance costs and downtime, prevent particle back streaming and reduce safety risks to maintenance technicians. The system has a process chamber with at least one port, a foreline valve connected to the port, and a vacuum manifold in fluid communication with the foreline valve. The mechanical pump is connected to the vacuum manifold for evacuating the contents of the process chamber. The isolation valve is connected between the foreline valve and the vacuum manifold and is operated in unison, or primarily in unison, with the foreline valve.

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