Processing System and semiconductor device production method usi

Details Processing System and semiconductor device production method usi Processing System and semiconductor device production method usi

1996-07-05

1998-10-27

Elmore, Reba I.

Boots, shoes, and leggings

36447816, 36447817, 364152, 36414003, 454187, 454188, 553852, B65G 6530

Patent

active

058285725

ABSTRACT:
A processing system for processing semiconductor devices includes an adjusting device for adjusting atmospheric conditions such as the cleanness and temperature in a clean room, at least one processing device disposed in the clean room, and a control device for controlling operation of the adjusting device in accordance with an operating state of at least one of the processing devices. The invention makes it possible to highly control the air conditioning of a required location and at a required time.

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