Processing system and device manufacturing method using the same

Details Processing system and device manufacturing method using the same Processing system and device manufacturing method using the same

1997-07-25

1998-05-05

Brahan, Thomas J.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

248638, 248639, F16M 100

Patent

active

057465622

ABSTRACT:
A processing system is disclosed which includes first and second chambers, each for accommodating a processing apparatus therein, each chamber being able to be kept gas tight, a coupling member for coupling the processing apparatuses accommodated in the first and second chambers with each other, and an elastic gas tightness holding member for gas tightly sealing portions between the coupling member and the first and second chambers.

REFERENCES:
patent: 4363217 (1982-12-01), Venuti
patent: 4394819 (1983-07-01), Averill
patent: 5042784 (1991-08-01), Murai et al.
patent: 5128975 (1992-07-01), Iwamoto et al.
patent: 5154730 (1992-10-01), Hodos et al.
patent: 5168512 (1992-12-01), Iwamoto et al.
patent: 5195113 (1993-03-01), Kuwabara

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