Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
Reexamination Certificate
2007-10-16
2007-10-16
Kornakov, M. (Department: 1746)
Cleaning and liquid contact with solids
Processes
Including use of vacuum, suction, or inert atmosphere
C134S001000, C134S001300, C134S026000, C134S034000, C134S036000, C438S906000
Reexamination Certificate
active
10366664
ABSTRACT:
A method for reducing energy consumption, and amounts of cleaning liquids and rinse liquids used. A cleaning head has a plurality of cleaning units and a drying unit. The organic, and inorganic, substance cleaning portions of each cleaning head, blows a first, and a second, cleaning agent selectively over a portion to be cleaned of a substrate, and sucks reaction products etc. through a first, and second, suction mouth, respectively. A rinse portion blows pure water over the portion of the substrate from which inorganic substances have been removed, and sucks its vapor through a third suction mouth. The drying unit dries the substrate by blowing out a heated gas from a hot wind blowing-out mouth. A light guide illuminates the portion to be cleaned, of the substrate, with ultraviolet light, and thereby decomposes residual organic substances.
REFERENCES:
patent: 6253462 (2001-07-01), Schwarz
patent: 6365531 (2002-04-01), Hayashi et al.
patent: 6457478 (2002-10-01), Danese
patent: 6488040 (2002-12-01), de Larios et al.
patent: 6599582 (2003-07-01), Kiguchi et al.
patent: 6616772 (2003-09-01), de Larios et al.
patent: 6730176 (2004-05-01), Kuyel
patent: 2003/0102013 (2003-06-01), Jackson
patent: 2004/0082183 (2004-04-01), Mori
patent: 0 587 889 (1994-03-01), None
patent: 62150828 (1987-07-01), None
patent: A-62-188322 (1987-08-01), None
patent: A-01-226156 (1989-09-01), None
patent: 402150028 (1990-06-01), None
patent: 03058417 (1991-03-01), None
patent: A-04-354334 (1992-12-01), None
patent: 6-204198 (1994-07-01), None
patent: A-07-241501 (1995-09-01), None
patent: A-08-264923 (1996-10-01), None
patent: A-10-092784 (1998-04-01), None
patent: 10242111 (1998-09-01), None
patent: A-11-008213 (1999-01-01), None
patent: A-11-204259 (1999-07-01), None
patent: A-2000-349059 (2000-12-01), None
patent: A-2002-009037 (2002-01-01), None
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