Fluid handling – Diverse fluid containing pressure systems – Gas pressure storage over or displacement of liquid
Reexamination Certificate
2011-04-05
2011-04-05
Schneider, Craig M (Department: 3753)
Fluid handling
Diverse fluid containing pressure systems
Gas pressure storage over or displacement of liquid
C396S626000, C141S098000
Reexamination Certificate
active
07918242
ABSTRACT:
A processing solution pressurized at a constant pressure is supplied to improve processing accuracy. A controller receives a pressure signal indicating a measured pressure exerted on a processing solution from a pressure sensor, and controls an electropneumatic regulator on the basis of the pressure signal so that pressure on the discharge side of the electropneumatic regulator is constant. The controller decides whether the processing solution contained in a processing solution tank has been depleted on the basis of a difference between a desired pressure and the pressure measured by the pressure sensor, and switches pressurizing shut-off valves accordingly.
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Japanese Office Action issued on Sep. 26, 2010 for Application No. 2006-139910 with English translation.
Minamida Junya
Okubo Takahiro
Schneider Craig M
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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