Processing, shipping and/or storage container for photomasks and

Details Processing, shipping and/or storage container for photomasks and Processing, shipping and/or storage container for photomasks and

1985-09-03

1987-07-14

Moy, Joseph Man-Fu

Special receptacle or package

For a vehicle

206453, 206454, 206522, B65D 8548

Patent

active

046796894

ABSTRACT:
This invention pertains to a system for holding Photomasks and/or wafers in a clean environment during processing, shipment and/or storage. The apparatus of the invention comprises a processing holder that may be used for the internal processing of photomasks and/or wafers, as well as being used as the inner portion of a photomask and/or wafer shipping and storage container.

REFERENCES:
patent: 1457496 (1923-06-01), Butler
patent: 3346101 (1967-10-01), Pestka
patent: 4091919 (1978-05-01), MacLeod et al.
patent: 4520925 (1985-06-01), Johnson
patent: 4557382 (1985-12-01), Johnson
patent: 4588086 (1986-05-01), Coe

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