Processing method for selectively irradiating a surface in prese

Details Processing method for selectively irradiating a surface in prese Processing method for selectively irradiating a surface in prese

1995-04-25

1999-11-09

Padgett, Marianne

Coating processes

Direct application of electrical, magnetic, wave, or...

Photoinitiated chemical vapor deposition

427555, 427557, 216 65, 216 66, B05D 300, C23C 1648

Patent

active

059810017

ABSTRACT:
A processing method comprises:

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R.A. Levy et al., "Characterization of LPCVD Aluminum for VLSI Processing" Journal of the Electrochem. Soc., 131, 2175 (1984). Sep.

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