Processing liquid supply unit

Details Processing liquid supply unit Processing liquid supply unit

1990-09-05

1991-07-30

Miles, Tim

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to condition of coating material

2611211, 261 231, 118715, B01F 304

Patent

active

050352008

ABSTRACT:
A processing liquid supply unit comprises a storage tank for storing a processing liquid, a sensor for sensing the amount of processing liquid stored in the storage tank, a refilling mechanism for automatically refilling the processing liquid into the storage tank when the sensor senses that the amount of processing liquid in the storage tank drops below the specified value and a processing liquid delivery mechanism for delivering the processing liquid from the storage tank to an object being processed.

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