Processing furnace for oxidizing objects

Details Processing furnace for oxidizing objects Processing furnace for oxidizing objects

1994-11-16

1998-07-07

Leung, Philip H.

Electric heating

Microwave heating

With diverse device

219687, 219686, 118715, 4272553, 437248, H05B 680, H01L 2131

Patent

active

057773009

ABSTRACT:
The present invention comprises a processing furnace for oxidizing object to be processed at a high temperature, pressure reducing means for evacuating the interior of the processing furnace, a burning apparatus disposed outside the processing furnace for burning hydrogen gas and oxygen gas to generate water vapor, a water vapor supply pipe interconnecting the burning apparatus and to the processing furnace, and a throttle disposed on the water vapor supply pipe for generating a pressure difference in the water vapor supply pipe between a side of the burning apparatus and a side of the processing furnace. Stable burning is ensured in the burning apparatus, which makes set oxidation under low pressures possible. It is possible that in place of the throttle, atomization means for atomizing pure water, or a boiling water vapor generating unit, or a microwave water vapor generating unit.

REFERENCES:
patent: 3306768 (1967-02-01), Peterson
patent: 4275094 (1981-06-01), Takagi et al.
patent: 4315479 (1982-02-01), Tole et al.
patent: 4436674 (1984-03-01), McMenamin
patent: 5081069 (1992-01-01), Parker et al.
patent: 5234501 (1993-08-01), Nakao et al.
patent: 5312509 (1994-05-01), Eschbach
patent: 5478400 (1995-12-01), Shimizu

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