Processing equipment for object to be processed

Details Processing equipment for object to be processed Processing equipment for object to be processed

2005-04-14

2010-12-07

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Gas or vapor deposition

With treating means

C118S715000, C118S724000, C156S345510, C156S345520, C156S345530, C156S345540, C156S345550, C361S234000, C279S128000

Reexamination Certificate

active

07846255

ABSTRACT:
Processing equipment for an object to be processed is provided with a process container, the internal of which can be evacuated, a gas introducing means for introducing a prescribed gas into the process container, a supporting table provided in the process container, a ring-shaped supporting part provided on the supporting table for supporting the object to be processed, a plurality of thermoelectric conversion elements provided on an upper plane of the supporting table on an inner side of the supporting part, an element storing space evacuating means for evacuating inside the element storing space formed by a lower plane of the object to be treated, which is supported by the supporting part, an upper plane of the supporting table and the supporting part.

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