Processing equipment

Details Processing equipment Processing equipment

2007-11-06

2007-11-06

Tadesse, Yewebdar (Department: 1734)

Coating apparatus

Projection or spray type

With projector heating, cleaning or conditioning

C118S326000, C118S052000

Reexamination Certificate

active

10831284

ABSTRACT:
A processing equipment includes a chamber, an airflow generator which generates a downward airflow in the chamber, a stage in the chamber, a nozzle which is arranged above the stage. The nozzle has a protector which is arranged around a supply port of the nozzle. The protector protects the supply port form the downward airflow.

REFERENCES:
patent: 5273192 (1993-12-01), Kamiya
patent: 5374312 (1994-12-01), Hasebe et al.
patent: 5772764 (1998-06-01), Akimoto
patent: 5849084 (1998-12-01), Hayes et al.
patent: 5939130 (1999-08-01), Shiraishi et al.
patent: 5-6845 (1993-01-01), None
patent: 2002-204992 (2002-07-01), None
patent: 2002204992 (2002-07-01), None
English Translated Abstract JP 2002204992 A.

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