Processing device and method of maintaining the device

Details Processing device and method of maintaining the device Processing device and method of maintaining the device

2008-05-06

2008-05-06

Lee, Kevin (Department: 3753)

Fluid handling

Processes

Cleaning, repairing, or assembling

C137S240000, C137S486000, C134S16600C, C134S022140, C134S022190, C134S095100

Reexamination Certificate

active

07367350

ABSTRACT:
A film processing device using vaporized liquid source capable of confirming the flow control accuracy of flow control equipment such as a mass flow controller (15) controlling the flow of the liquid source without separating the flow control equipment from piping and disassembling the piping, comprising a bypass passage (41) for bypassing a part of a washing fluid feed passage (32) for feeding washing fluid to a liquid source feed passage (12) and a flowmeter such as an MFM (42), wherein the washing fluid is allowed to flow to the mass flow controller (15) through the MFM (42), and the flow of the washing fluid detected by the MFM (42) is compared with a target flow set in the mass flow controller (15) to check whether the mass flow controller (15) operates normally or not.

REFERENCES:
patent: 5660201 (1997-08-01), Turner
patent: 5690743 (1997-11-01), Murakami et al.
patent: 6953047 (2005-10-01), Birtcher et al.
patent: 6-53103 (1994-02-01), None
patent: 6-102068 (1994-04-01), None
patent: 1996-0002583 (1996-01-01), None

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