Processing apparatus, measuring apparatus, and device...

Chemical apparatus and process disinfecting – deodorizing – preser – Control element responsive to a sensed operating condition

Reexamination Certificate

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Details

C422S109000, C422S110000, C422S112000, C118S715000, C118S72300R, C118S019000

Reexamination Certificate

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06984362

ABSTRACT:
A processing apparatus includes a sealed vacuum chamber which contains a processing portion; a pressure controlling system which keeps the internal pressure of the sealed vacuum chamber constant at a predetermined level by exhausting the ambient gas in the sealed vacuum chamber; and an ambient gas recirculating system which recirculates the ambient gas exhausted from the sealed vacuum chamber back into the sealed vacuum chamber; wherein the ambient as recirculated by the ambient gas recirculating system is blown into the sealed vacuum chamber so that a gas flow is generated in a predetermined direction along the processing portion.

REFERENCES:
patent: 4805556 (1989-02-01), Hagan et al.
patent: 5267292 (1993-11-01), Tanaka et al.
patent: 5871587 (1999-02-01), Hasegawa et al.
patent: 39 40 405 (1990-06-01), None
patent: 2-156625 (1990-06-01), None
patent: 8-264404 (1996-10-01), None

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