Fluid handling – Systems – With pump
Reexamination Certificate
2006-07-18
2006-07-18
Bueker, Richard (Department: 1763)
Fluid handling
Systems
With pump
C137S565170, C137S565300, C137S565330, C118S708000, C118S715000, C118S719000
Reexamination Certificate
active
07077159
ABSTRACT:
An apparatus115for processing a substrate20,comprises an integrated pumping system155having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus115comprises a chamber, such as a load-lock chamber110,transfer chamber115,or process chamber120.An integrated and local pump165is abutting or adjacent to one of the chambers110, 115, 120for evacuating gas from the chambers. The pump has an inlet170connected to a chamber110, 115, 120,and an outlet175that exhausts the gas to atmospheric pressure. Preferably, the pump165comprises a pre-vacuum pump or a low vacuum pump.
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Reimer Peter
Sabouri Pedram
Smith Dennis R.
Bueker Richard
Patterson & Sheridan LLP
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