Processing apparatus for manufacturing semiconductors

Details Processing apparatus for manufacturing semiconductors Processing apparatus for manufacturing semiconductors

1999-04-08

2000-10-31

Hiteshew, Felisa

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118500, 118728, 20429815, 269 21, C23F 102, C23C 1600, B05C 1300, B25B 1100, B25B 1300

Patent

active

061396826

ABSTRACT:
A processing apparatus comprises a support for supporting a body to be processed within a processing chamber. The support is equipped with a lift for lifting said body and lowering the body. The lift includes a plurality of rods disposed in a plurality of cylinders formed through the support, respectively. Each of the plurality of rods has a piston for movement in one of the plurality of cylinders to produce reduced pressure in a space within the cylinder between the piston and the body resting on the support. An actuator is drivingly coupled with the plurality of rods to lower the rods against suction created due to reduced pressure in the spaces.

REFERENCES:
patent: 3711081 (1973-01-01), Cachon
patent: 4183545 (1980-01-01), Daly
patent: 4265476 (1981-05-01), Elgart
patent: 5035409 (1991-07-01), Mulliner
patent: 5374829 (1994-12-01), Sakamoto et al.
patent: 5407519 (1995-04-01), Joffe et al.
patent: 5449410 (1995-09-01), Chang et al.
patent: 5516367 (1996-05-01), Lei et al.
patent: 5534073 (1996-07-01), Kinoshita et al.
patent: 5766365 (1998-06-01), Umotoy et al.
patent: 5855679 (1999-01-01), Ogawa
patent: 6059985 (2000-05-01), Yoshimura et al.
Japanese Office Action dated Feb. 16, 1999, with partial translation.

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