Processing apparatus comprising a cassette member temporarily sw

Details Processing apparatus comprising a cassette member temporarily sw Processing apparatus comprising a cassette member temporarily sw

1981-07-29

1983-06-14

Smith, John D.

Material or article handling

Movable rack having superposed, charge-supporting elements,...

Rack moved vertically by elevating means

414217, 414754, 204298, 118729, C23C 1308

Patent

active

043880347

ABSTRACT:
In a processing apparatus comprising successively arranged inlet, processing, and outlet chambers, a cassette member for holding a plurality of substrates in either or each of the inlet and the outlet chambers is reversibly moved between home and temporary positions at which each substrate is kept substantially horizontal and vertical, respectively.

REFERENCES:
patent: 3404661 (1966-10-01), Mathias et al.
patent: 3584847 (1971-06-01), Hammond, Jr. et al.
patent: 4047624 (1977-09-01), Dorenbos
patent: 4113082 (1978-09-01), Timin
patent: 4261808 (1981-04-01), Walter

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