Processing apparatus and processing method

Details Processing apparatus and processing method Processing apparatus and processing method

1997-06-19

1998-09-29

Mathews, A. A.

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

396627, 134153, 134199, 134902, G03D 504

Patent

active

058157620

ABSTRACT:
A development processing apparatus includes a processing unit for storing a substrate S and a processing solution supply nozzle arranged above the substrate S stored in the processing unit. A processing solution storage is formed inside the supply nozzle. A supply passage for supplying the processing solution into the solution storage is connected to the supply nozzle. A plurality of eject holes for ejecting the processing solution in the solution storage are formed in a lower surface of the supply nozzle. In this processing apparatus, the upper surface of the solution storage consists of at least one inclined surface, and an exhaust port is formed in a high portion of the inclined surface.

REFERENCES:
patent: 4755844 (1988-07-01), Tsuchiya et al.
patent: 4922277 (1990-05-01), Carlson et al.
patent: 5555234 (1996-09-01), Sugimoto
patent: 5625433 (1997-04-01), Inada et al.
patent: 5689749 (1997-11-01), Tanaka et al.

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