Refrigeration – Processes – Compressing – condensing and evaporating
Reexamination Certificate
2006-02-07
2006-02-07
Ali, Mohammad M. (Department: 3744)
Refrigeration
Processes
Compressing, condensing and evaporating
C062S185000, C062S259200
Reexamination Certificate
active
06993919
ABSTRACT:
The electrode temperature control device in a processing apparatus100includes a freezing circuit110comprising a compressor148, a condenser142, an expansion valve150and an evaporator108with the evaporator disposed inside a lower electrode106. This electrode temperature control device does not require components such as a coolant tank for storing the coolant, a pump for supplying the coolant to the processing apparatus, a heater for adjusting the temperature of the coolant and a heat exchanger for exchanging heat between a primary coolant and a secondary coolant. Thus, the production cost can be lowered, a reduction in installation area through miniaturization of the apparatus is achieved and more efficient use of energy is achieved as well. In addition, by using CO2as the coolant, the GWP value can be reduced to approximately 1/8000 to 1/7000 that of Freon.
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Furuya Masao
Hirooka Takaaki
Tsutsumi Shohei
Ali Mohammad M.
Daikin Industries Ltd.
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Tokyo Electron Limited
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