Drying and gas or vapor contact with solids – Process – Gas or vapor pressure varies during treatment
Reexamination Certificate
2005-02-25
2008-03-25
Rinehart, Kenneth (Department: 3749)
Drying and gas or vapor contact with solids
Process
Gas or vapor pressure varies during treatment
C034S406000, C034S476000, C034S493000, C034S497000, C034S092000
Reexamination Certificate
active
07347006
ABSTRACT:
A processing apparatus includes a first detection unit for detecting a temperature of an inner wall of the vacuum vessel, a second detection unit for detecting a temperature of the processing unit, and a first control unit for controlling a temperature of the gas. The first control unit controls the temperature of the gas based on a temperature gradient between the temperatures of the inner wall and the gas or a temperature gradient between the temperatures of the processing unit and the gas. A method for removing particles from a processing apparatus includes a first detection step for detecting a temperature of an inner wall of the vacuum vessel, a second detection step for detecting a temperature of the processing unit, a first control step for controlling a temperature of the gas, and a gas introduction step for introducing the gas into the inner space of the vacuum vessel.
REFERENCES:
patent: 4816046 (1989-03-01), Maeba et al.
patent: 6811651 (2004-11-01), Long
patent: 3-147317 (1991-06-01), None
Moriya Tsuyoshi
Nagaike Hiroshi
Nakayama Hiroyuki
Okuyama Kikuo
Shimada Manabu
Rinehart Kenneth
Tokyo Electron Limited
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