Electric heating – Metal heating – By arc
Patent
1987-07-16
1990-01-02
Paschall, M. H.
Electric heating
Metal heating
By arc
156345, 21912142, 21912143, 204298, 118709, B23K 900
Patent
active
048914886
ABSTRACT:
A process module wherein radiant heating is combined with the capability for generating a plasma in proximity to the wafer face. It is useful to clamp the slice to a susceptor which is of the same material as the wafer, or at least has essentially the same thermal coefficient of expansion. The susceptor is directly heated by a radiant heater, but the rate of temperature change is slow enough that no large thermal gradients between the susceptor and the wafer develop.
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Davis Cecil J.
Jucha Rhett B.
Honeycutt Gary C.
Merrett N. Rhys
Paschall M. H.
Sharp Melvin
Texas Instruments Incorporated
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