Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Patent
1993-12-10
1995-08-08
Nilson, Robert G.
Fluid handling
Line condition change responsive valves
Pilot or servo controlled
1374875, 137798, 137884, G05D 706
Patent
active
054390265
ABSTRACT:
There is disclosed a flow control apparatus including a base body having a fluid inlet and a fluid outlet and a flow path for causing the inlet to communicate with the outlet, a flow adjustment means for adjusting a flow rate of the fluid in the flow path of said base body, a flow-rate detection means for detecting the flow rate of the fluid in the flow path, and a flow control means for outputting a flow-rate control signal to the flow adjustment means on the basis of a detection result of the flow-rate detection means to control the flow rate of the fluid to a predetermined value. At least one of the fluid inlet and the fluid outlet is positioned such that the flow direction of the fluid at a corresponding one of the fluid inlet and the fluid outlet is perpendicular to the flow path.
REFERENCES:
patent: 2834368 (1958-05-01), Gray
patent: 4422470 (1983-12-01), Jackson
patent: 4507707 (1985-03-01), Willis
patent: 4977916 (1990-12-01), Ohmi
Matsuo Takenobu
Moriya Shuji
Wakabayashi Tsuyoshi
Nilson Robert G.
Tokyo Electron Limited
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