Processing apparatus

Details Processing apparatus Processing apparatus

1990-06-08

1992-01-14

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118715, 118728, 219385, 219390, C23C 1600

Patent

active

050800396

ABSTRACT:
A processing apparatus includes a processing chamber and an insertion jig for inserting an object to be processed into the processing chamber. The processing chamber and the insertion jig are adapted to be individually movable relative to a heating section, so that the operation of loading and unloading the object into and from the processing chamber effected by the insertion jig is conducted outside the heating section, thereby preventing the outside air from being induced to enter the heated processing chamber, together with the object of the processing, and thus avoiding the occurrence of various problems, for example, the object of processing being disorderly oxidized by the oxygen contained in the outside air, and the foreign matter contained in the outside air being undesirably attached to the surface of the object, so as to obtain excellent processing results. Further, the insertion jig, which is adapted to insert an object to be processed into the processing chamber through an opening provided therein, is provided with an auxiliary tube which is movable relative to the insertion jig in the direction of movement of the jig and which is detachably connected to the opening of the processing chamber, thereby preventing the outside air from being induced to enter the heated processing chamber, together with the object of processing, and thus avoiding various problems, e.g., the object of processing being undesirably oxidized by the oxygen contained in the outside air, and the foreign matter contained in the outside air being attached to the surface of the object of processing. In consequence, it is possible to obtain excellent processing results.

REFERENCES:
patent: 3828722 (1974-08-01), Reuter
patent: 4436509 (1984-03-01), Kocmanek
patent: 4640223 (1987-02-01), Dozier
patent: 4695706 (1987-09-01), Mizushina

Affiliated with

Also associated with

Rating

Processing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Processing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Processing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-533778