Adhesive bonding and miscellaneous chemical manufacture – Surface bonding means and/or assembly means therefor – Presses or press platen structures – per se
Patent
1998-04-16
2000-05-16
Osele, Mark A.
Adhesive bonding and miscellaneous chemical manufacture
Surface bonding means and/or assembly means therefor
Presses or press platen structures, per se
118316, 134 72, 216 92, B32B 3500
Patent
active
060622881
ABSTRACT:
A processing apparatus, which removes a processing agent adhered to an peripheral portion of a substrate on which the processing agent is coated, comprises a nozzle having a recess portion into which the peripheral portion of the substrate is inserted and for supplying a solvent to the peripheral portion of the substrate which has been inserted into the recess portion, a moving mechanism for moving the nozzle along the peripheral portion of the substrate, and rotating bodies for guiding the peripheral portion of the substrate to an inlet of the recess portion of the nozzle, whereby the processing agent on the peripheral portion of the substrate can be removed by the solvent which has been supplied to the peripheral portion of the substrate.
REFERENCES:
patent: 5688411 (1997-11-01), Kutsuzawa et al.
patent: 5718763 (1998-02-01), Tateyama et al.
patent: 5904164 (1999-05-01), Wagner et al.
patent: 5952050 (1999-09-01), Doan
Millner Monica E.
Osele Mark A.
Tokyo Electron Limited
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