Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent
1994-11-07
1999-10-19
Silverberg, Sam
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
216 58, 216 57, 1566401, H01L 21304, H01L 21306
Patent
active
059671564
ABSTRACT:
In one aspect, foreign material on the surface of a substrate is processed to form a reaction product by: providing a directed flow of a fluid, comprising a reactant, to the vicinity of the foreign material to be processed; and delivering an aerosol of at least partially frozen particles continuously or intermittently to the foreign material to aid the reactant react with the foreign material to form the reaction product. In another aspect, foreign material is processed by: providing a directed flow of a fluid, comprising a reactant, to the foreign material to be processed in a limited area reaction region corresponding to a minor fraction of the total area of the substrate; agitating the foreign material in the limited area reaction region to aid the reactant react with the foreign material to form the reaction product; and providing relative motion between the substrate and the directed flow of fluid to achieve a substantially uniform exposure of the foreign material to fluid flow and the agitation. Infrared or ultraviolet radiation may also be delivered to the foreign material. Specific methods for processing oxide layers, organic layers and metal contamination are also described.
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Rose Peter H.
Sferlazzo Piero
Krytek Corporation
Silverberg Sam
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