Processes of forming small diameter rods and tubes

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having growth from a solution comprising a solvent which is...

Reexamination Certificate

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C117S069000, C117S071000, C117S074000

Reexamination Certificate

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07611578

ABSTRACT:
The invention provides a method for the production of a photonic device comprising providing a substrate, forming in the substrate substantially straight pores, lining or filling the pores with a material having voltage-dependent index of refraction, and removing part but not all of the substrate materials so that an array remains of tubes or rods of material having voltage-dependent index of refraction. In a variant of the method the deposited material is piezoelectric and the substrate is completely removed, resulting in piezoelectric tubes or rods of small diameter, generally below 10 μm.

REFERENCES:
patent: 6093246 (2000-07-01), Koops et al.
patent: 101 01 119 (2002-07-01), None
Steinhart, M. et al.Polymer Nanotubes by Wetting of Ordered Porous Templates, Science, American Association for the Advancement of Science, U.S. vol. 296, Jun. 14, 2002 p. 1997.
J. Schilling, et al.Three Dimensional Photonic Crystals Based on Macroporous Silicon with Modulated Pore Diameter, Applied Physics Letters, American Institute of Physics, New York, vol. 78, No. 9, Feb. 26, 2001 pp. 1180-1182.
W. Hu, et al.,Growth of Well-Aligned Carbon Nanotube Arrays on Silicon Substrates Using Porous Alumina Film As a Nanotemplate, Applied Physics Letters, American Institute of Physics, New York, vol. 79, No. 19, Nov. 5, 2001.
F.D. Morrison, et al.,High Aspect Ratio Piezoelectric Strontium-Bismuth-Tantalate Nanotubes, Journal of Physics, Condensed matter. Aug. 27, 2003, pp. L527-L532.
Y. Luo et al.,Ferroelectric lead zirconate titanate and barium titanate nanotubes, Integrated Ferroelectrics, 2003, Gordon & Breach, Netherlands, vol. 59, Mar. 9, 2003 pp. 1513-1520.
F.D. Morrison, et al.,Ferroelectric nanotubes, Reviews on Advanced Materials Science, 2003, Advanced Study Center, Russia, vol. 4, No. 2, Aug. 2003.
International Search Report dated May 26, 2004.

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