Processes for the scrubbing of noxious substances

Details Processes for the scrubbing of noxious substances Processes for the scrubbing of noxious substances

1997-07-14

1999-07-20

Smith, Duane S.

Gas separation: processes

With control responsive to sensed condition

Concentration sensed

553851, 55418, 95149, 96264, 96379, 96399, 438905, 438909, B01D 4700

Patent

active

059251670

ABSTRACT:
A method for the scrubbing of noxious substances from an exhaust gas stream from an evacuated process chamber containing a tool for the processing of semiconductor devices. The method comprises directing the stream from the chamber in to a duct containing a multi-way valve and selectively adjusting the valve to cause different fractions of the stream to be directed to relevant treatment/collection/exhaust points.

REFERENCES:
patent: 4704951 (1987-11-01), Pruchon
patent: 4877429 (1989-10-01), Hunter
patent: 5043299 (1991-08-01), Chang et al.
patent: 5122170 (1992-06-01), Satoh et al.
patent: 5350336 (1994-09-01), Chen et al.
patent: 5584963 (1996-12-01), Takahashi
patent: 5626820 (1997-05-01), Kinkead et al.

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