Processes for the production of organometallic compounds

Details Processes for the production of organometallic compounds Processes for the production of organometallic compounds

2005-02-10

2010-10-19

Mayes, Melvin C (Department: 1793)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C556S035000, C556S036000, C556S138000, C556S021000, C987S009000, C987S016000, C987S018000

Reexamination Certificate

active

07816550

ABSTRACT:
This invention relates to processes for the production of organometallic compounds represented by the formula M(L)3wherein M is a Group VIII metal, e.g., ruthenium, and L is the same or different and represents a substituted or unsubstituted amidinato group or a substituted or unsubstituted amidinato-like group, which process comprises (i) reacting a substituted or unsubstituted metal source compound, e.g., ruthenium (II) compound, with a substituted or unsubstituted amidinate or amidinate-like compound in the presence of a solvent and under reaction conditions sufficient to produce a reaction mixture comprising said organometallic compound, e.g., ruthenium (III) compound, and (ii) separating said organometallic compound from said reaction mixture. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions.

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