Processes for the production of organometallic compounds

Details Processes for the production of organometallic compounds Processes for the production of organometallic compounds

2011-07-05

2011-07-05

Gonzalez, Porfirio Nazario (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C427S248100, C427S255280, C252S519200, C106S001260

Reexamination Certificate

active

07973188

ABSTRACT:
This invention relates to processes for the production of organometallic compounds represented by the formula M(L)3wherein M is a Group VIII metal, e.g., ruthenium, and L is the same or different and represents a substituted or unsubstituted amidinato group or a substituted or unsubstituted amidinato-like group, which process comprises (i) reacting a substituted or unsubstituted metal source compound, e.g., ruthenium (II) compound, with a substituted or unsubstituted amidinate or amidinate-like compound in the presence of a solvent and under reaction conditions sufficient to produce a reaction mixture comprising said organometallic compound, e.g., ruthenium (III) compound, and (ii) separating said organometallic compound from said reaction mixture. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions.

REFERENCES:
patent: 6262198 (2001-07-01), Schlund et al.
patent: 6403735 (2002-06-01), Becke et al.
patent: 2004/0110632 (2004-06-01), Sita et al.
patent: 2004/0127732 (2004-07-01), Thompson et al.
patent: 2006/0141155 (2006-06-01), Gordon et al.
patent: WO2004/052896 (2004-06-01), None
Bailey, Philip J. et al. Guanidinates as Chelating Anionic Ligands for Early, Middle, and Late Transition metals: Syntheses ad Crystal Structures of . . . J. Chem. Soc. Dalton Trans. (2000) pp. 1887-1891.
Booyong, S. Lim et al. Synthesis and Characterization of Volatile, Thermally Stable, Reative Transition Metal Amidinates. Inorganic Chemistry Preprint.
Clark, Terry et al. Amidinato and Triazenido Complexes of Ruthenium (II): X-ray Crystal Structure of the N, N′-Diphenylformamidine Fragmentation Product . . . Polyhedron 20 (2001) pp. 1875-1880.
DuBois, M. Rakowski et al. Nucleophilic Substitution of η5-Pyrrole Ligands in Ruthenium (II) Complexes. Organometallics 16 (1997) pp. 2325-2344.
DuBois, M. Rakowski. The Activation of η5-pyrrole Complexes Toward Nucleophilic Attack. Coordination Chemistry Reviews 174 (1998) pp. 191-205.
McComas, Casey C. et al. Neutral Ru (η5-pyrrole) Complexes. Synthesis and Structure of Diazaruthenocenes and . . . Organometallics 19 (2000) pp. 2853-2857.

Affiliated with

Also associated with

Rating

Processes for the production of organometallic compounds does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Processes for the production of organometallic compounds, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Processes for the production of organometallic compounds will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2631525