Processes for producing polysiloxazanes and silicon oxynitride f

Details Processes for producing polysiloxazanes and silicon oxynitride f Processes for producing polysiloxazanes and silicon oxynitride f

1987-02-12

1989-09-26

Lorin, Hubert

Plastic and nonmetallic article shaping or treating: processes

Including step of generating heat by friction

264 83, 264103, 264205, 2642111, 264555, 423325, 423344, 501 95, 501 97, 528 10, 528 31, D01F 908, D01F 1100, C04B 3500, C04B 3558

Patent

active

048698580

ABSTRACT:
Novel polysiloxazanes comprising [(SiH.sub.2).sub.n NH] and [(SiH.sub.2).sub.m O] as the main repeating units are provided. The polysiloxazanes are produced by reacting a dihalosilane or an adduct thereof with a Lewis base, with ammonia and water vapor or oxygen. From the polysiloxazane, novel silicon oxynitride shapes can be produced and the silicon oxynitride shapes are essentially composed of silicon, nitride (5 mol % or more) and oxygen (5 mol % or more).

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Okamura et al., The Synthesis of Silicon Oxynitride Fibers by Nitridation of Polycarbosilane, Chemistry Letter, pp. 2059-2060, 1984, The Chem. Soc. of Japan.

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