Processes for pattern formation using photosensitive composition

Radiation imagery chemistry: process – composition – or product th – Stripping process or element – Forming nonplanar image

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Details

430325, 430326, 430327, 430330, G03F 730, G03F 738, G03F 740

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active

056502591

ABSTRACT:
A photosensitive composition which comprises, as essential components:

REFERENCES:
patent: 3779778 (1973-12-01), Smith et al.
patent: 4491628 (1985-01-01), Ito et al.
patent: 5364738 (1994-11-01), Kondo et al.
patent: 5366846 (1994-11-01), Knudson et al.
patent: 5496678 (1996-03-01), Imai et al.

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