Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate
2002-12-25
2009-11-24
Moore, Karla (Department: 1792)
Coating apparatus
Gas or vapor deposition
Multizone chamber
C156S345240, C156S345310, C156S345320, C414S217000, C414S935000, C414S939000
Reexamination Certificate
active
07622006
ABSTRACT:
A main carrying device forming a part of a processing system, comprising a casing (40) forming a main carrying chamber (44) having vacuum atmosphere, the casing (40) further comprising a plurality of transfer ports (52A,52B) for transferring the processed body (W) between the carrying chamber44and the outside, a mobile body (58) is slidably installed on a guide rail (48) horizontally installed in the carrying chamber (44), a linear motor mechanism (54, 62) for moving the mobile body (58) along the guide rail (48) is installed, a holding body (64) for holding the processed body (W) is liftably connected to the mobile body (58) through a support member (66), and a lifting mechanism (74) for lifting the support member (66) relative to the mobile body (58) is installed in the casing (40) at a position corresponding to the transfer ports (52A,52B).
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Ishizawa Shigeru
Saeki Hiroaki
Moore Karla
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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