Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2008-05-06
2008-05-06
Chawan, Sheela (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C438S014000, C438S700000, C702S182000, C716S030000
Reexamination Certificate
active
10871294
ABSTRACT:
Methods for monitoring and controlling process variables of interest during the substrate manufacturing process is provided. Numerical estimates for selected attributes of a feature of interest may be analyzed and applied in a numerical estimator to estimate the process variable of interest for a given product process run. The resulting estimations may be used to provide feedback control data for error correction on subsequent product substrate.
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Chawan Sheela
Intel Corporation
Schwabe Williamson & Wyatt P.C.
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