Process tube for semiconductor device manufacturing apparatus

Details Process tube for semiconductor device manufacturing apparatus Process tube for semiconductor device manufacturing apparatus

2006-05-23

2006-05-23

Reid, Stella (Department: 2912)

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

Design Patent

active

D0521464

CLAIM:
The ornamental design for a process tube for semiconductor device manufacturing apparatus, as shown and described.

REFERENCES:
patent: 5037502 (1991-08-01), Suzuki et al.
patent: 5279986 (1994-01-01), Maloney et al.
patent: 5352293 (1994-10-01), Yang et al.
patent: 5752819 (1998-05-01), Hansotte et al.
patent: D405062 (1999-02-01), Shimazu
patent: 6240875 (2001-06-01), Van Wijck et al.
patent: 6402849 (2002-06-01), Kwag et al.
patent: 2002-280378 (2002-09-01), None

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