Process tube for manufacturing semiconductor wafers

Machines not elsewhere specified – Heat treatment – welding or brazing – Scientific – laboratory – or industrial heating equipment

Design Patent

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Details

CD13S182000

Design Patent

active

D0594488

CLAIM:
The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.

REFERENCES:
patent: 5711436 (1998-01-01), Moeller et al.
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patent: D520467 (2006-05-01), Ishii et al.
patent: D521464 (2006-05-01), Ishii et al.
patent: D568838 (2008-05-01), Terada et al.
patent: D586768 (2009-02-01), Inoue et al.
patent: 2008/0132079 (2008-06-01), Okada et al.

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