Process tube for manufacturing semiconductor wafers

Details Process tube for manufacturing semiconductor wafers Process tube for manufacturing semiconductor wafers

2007-04-11

2009-02-17

Sikder, Selina (Department: 2912)

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

Design Patent

active

D0586768

CLAIM:
The ornamental design for a process tube for manufacturing semiconductor wafers, as shown and described.

REFERENCES:
patent: 5618349 (1997-04-01), Yuuki
patent: D404368 (1999-01-01), Shimazu
patent: D405062 (1999-02-01), Shimazu
patent: D406113 (1999-02-01), Hanagata et al.
patent: 5948300 (1999-09-01), Gero et al.
patent: 6251189 (2001-06-01), Odake et al.
patent: 6538237 (2003-03-01), Yang et al.
patent: D520467 (2006-05-01), Ishii et al.
patent: D521464 (2006-05-01), Ishii et al.
patent: 2002/0014483 (2002-02-01), Suzuki et al.

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