Process tool throughput monitoring system and method

Details Process tool throughput monitoring system and method Process tool throughput monitoring system and method

2005-06-14

2005-06-14

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S115000

Reexamination Certificate

active

06907306

ABSTRACT:
A process tool monitoring system is disclosed including a retrieving module, a calculating module, and an output module. The retrieving module retrieves parameter data from a process tool. Where the process tool is a furnace, the parameter data may include furnace temperature data, times of day that wafers were loaded into the furnace, and times of day that wafers were unloaded from the furnace. The retrieving module stores the parameter data in a database, and the calculating module accesses the parameter data within the database, and calculates a present throughput data dependent upon the parameter data, wherein the present throughput data is indicative of a present throughput of the process tool. The output module provides the present throughput data to an operator of the process tool. The process tool monitoring system may be used to monitor multiple process tools, and to compare the throughputs of the multiple process tools.

REFERENCES:
patent: 6549822 (2003-04-01), Toprac
patent: 6630995 (2003-10-01), Hunter
patent: 6662066 (2003-12-01), Yu et al.
patent: 2002/0138169 (2002-09-01), Sakaguchi
patent: 2004/0078310 (2004-04-01), Shaffer

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