Process to obtain multielement linear bidimensional infrared det

Details Process to obtain multielement linear bidimensional infrared det Process to obtain multielement linear bidimensional infrared det

1980-02-12

1982-01-26

Walton, Donald L.

Metal working

Method of mechanical manufacture

Assembling or joining

29580, 29590, H01L 3118

Patent

active

043121152

ABSTRACT:
An improved method for use in fabricating individual semiconductor radiation detectors on a chip is characterized by forming generally V-shaped grooves converging toward one another from opposite sides of the chip into the thickness dimension thereof. The grooves meet within the chip and serve to separate individual detectors.

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patent: 3427709 (1969-02-01), Schutze et al.
patent: 3623218 (1971-11-01), Mitarai et al.
patent: 3689993 (1972-09-01), Tolar
patent: 3890215 (1975-06-01), Dilorenzo et al.
patent: 3977071 (1976-08-01), Jarman
patent: 4217689 (1980-08-01), Jujii et al.

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