Process to manufacture CPP GMR read head

Details Process to manufacture CPP GMR read head Process to manufacture CPP GMR read head

2007-10-18

2010-10-12

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603120, C029S603130, C029S603140, C216S022000, C216S066000, C204S192340, C360S324000, C360S324100

Reexamination Certificate

active

07810227

ABSTRACT:
Using a beam of xenon ions together with a suitable mask, a GMR stack is ion milled until a part of it, no more than about 0.1 microns thick, has been removed so that a pedestal, having sidewalls comprising a vertical section that includes all of the free layer, has been formed. This is followed by formation of the dielectric and conductive lead layers in the usual way. Using xenon as the sputtering gas enables the point at which milling is terminated to be more precisely controlled.

REFERENCES:
patent: 6002553 (1999-12-01), Stearns et al.
patent: 6058123 (2000-05-01), Haase et al.
patent: 6421212 (2002-07-01), Gibbons et al.
patent: 6554974 (2003-04-01), Shiratori
patent: 2002/0154458 (2002-10-01), Lin et al.
patent: 2003/0039079 (2003-02-01), Zheng et al.
patent: 10255233 (1998-09-01), None

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